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Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater

[Image: see text] In this study, a simple and cost-effective metal oxide semiconductor (MOS) gas sensor, which can be fabricated utilizing only two photolithography steps, was designed and developed through the planar microelectromechanical systems (MEMS) technique. Ball-milled porous tin dioxide na...

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Detalles Bibliográficos
Autores principales:	Chen, Yulong, Li, Mingjie, Yan, Wenjun, Zhuang, Xin, Ng, Kar Wei, Cheng, Xing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2021
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818299/ https://www.ncbi.nlm.nih.gov/pubmed/33490780 http://dx.doi.org/10.1021/acsomega.0c04340

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