Comparative study on the specimen thickness measurement using EELS and CBED methods

Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were...

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Autor principal: Heo, Yoon-Uk
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Singapore 2020
Materias:
Research
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818352/
https://www.ncbi.nlm.nih.gov/pubmed/33580338
http://dx.doi.org/10.1186/s42649-020-00029-4
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author Heo, Yoon-Uk
author_facet Heo, Yoon-Uk
author_sort Heo, Yoon-Uk
collection PubMed
description Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the [Formula: see text] diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72 ~ 113 nm with a difference of less than 5%.
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spelling pubmed-78183522021-02-10 Comparative study on the specimen thickness measurement using EELS and CBED methods Heo, Yoon-Uk Appl Microsc Research Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the [Formula: see text] diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72 ~ 113 nm with a difference of less than 5%. Springer Singapore 2020-05-12 /pmc/articles/PMC7818352/ /pubmed/33580338 http://dx.doi.org/10.1186/s42649-020-00029-4 Text en © The Author(s) 2020 Open AccessThis article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Research
Heo, Yoon-Uk
Comparative study on the specimen thickness measurement using EELS and CBED methods
title Comparative study on the specimen thickness measurement using EELS and CBED methods
title_full Comparative study on the specimen thickness measurement using EELS and CBED methods
title_fullStr Comparative study on the specimen thickness measurement using EELS and CBED methods
title_full_unstemmed Comparative study on the specimen thickness measurement using EELS and CBED methods
title_short Comparative study on the specimen thickness measurement using EELS and CBED methods
title_sort comparative study on the specimen thickness measurement using eels and cbed methods
topic Research
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7818352/
https://www.ncbi.nlm.nih.gov/pubmed/33580338
http://dx.doi.org/10.1186/s42649-020-00029-4
work_keys_str_mv AT heoyoonuk comparativestudyonthespecimenthicknessmeasurementusingeelsandcbedmethods

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