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Capacitive Based Micromachined Resonators for Low Level Mass Detection

Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mas...

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Detalles Bibliográficos
Autores principales:	Nathani, Muhammad Umair, Nazemi, Haleh, Love, Calvin, Babu Lopez, Yameema, Swaminathan, Siddharth, Emadi, Arezoo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7823894/ https://www.ncbi.nlm.nih.gov/pubmed/33375651 http://dx.doi.org/10.3390/mi12010013

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