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Fabricating Femtosecond Laser-Induced Periodic Surface Structures with Electrophysical Anisotropy on Amorphous Silicon

One-dimensional periodic surface structures were formed by femtosecond laser irradiation of amorphous hydrogenated silicon (a-Si:H) films. The a-Si:H laser processing conditions influence on the periodic relief formation as well as correlation of irradiated surfaces structural properties with their...

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Detalles Bibliográficos
Autores principales: Shuleiko, Dmitrii, Martyshov, Mikhail, Amasev, Dmitrii, Presnov, Denis, Zabotnov, Stanislav, Golovan, Leonid, Kazanskii, Andrei, Kashkarov, Pavel
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7824488/
https://www.ncbi.nlm.nih.gov/pubmed/33375301
http://dx.doi.org/10.3390/nano11010042