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Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825539/ https://www.ncbi.nlm.nih.gov/pubmed/33419203 http://dx.doi.org/10.3390/nano11010117 |
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author | Jasulaneca, Liga Livshits, Alexander I. Meija, Raimonds Kosmaca, Jelena Sondors, Raitis Ramma, Matiss M. Jevdokimovs, Daniels Prikulis, Juris Erts, Donats |
author_facet | Jasulaneca, Liga Livshits, Alexander I. Meija, Raimonds Kosmaca, Jelena Sondors, Raitis Ramma, Matiss M. Jevdokimovs, Daniels Prikulis, Juris Erts, Donats |
author_sort | Jasulaneca, Liga |
collection | PubMed |
description | Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS. |
format | Online Article Text |
id | pubmed-7825539 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-78255392021-01-24 Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches Jasulaneca, Liga Livshits, Alexander I. Meija, Raimonds Kosmaca, Jelena Sondors, Raitis Ramma, Matiss M. Jevdokimovs, Daniels Prikulis, Juris Erts, Donats Nanomaterials (Basel) Article Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS. MDPI 2021-01-06 /pmc/articles/PMC7825539/ /pubmed/33419203 http://dx.doi.org/10.3390/nano11010117 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Jasulaneca, Liga Livshits, Alexander I. Meija, Raimonds Kosmaca, Jelena Sondors, Raitis Ramma, Matiss M. Jevdokimovs, Daniels Prikulis, Juris Erts, Donats Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title | Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title_full | Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title_fullStr | Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title_full_unstemmed | Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title_short | Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches |
title_sort | fabrication and characterization of double- and single-clamped cuo nanowire based nanoelectromechanical switches |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825539/ https://www.ncbi.nlm.nih.gov/pubmed/33419203 http://dx.doi.org/10.3390/nano11010117 |
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