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Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches

Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology...

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Autores principales: Jasulaneca, Liga, Livshits, Alexander I., Meija, Raimonds, Kosmaca, Jelena, Sondors, Raitis, Ramma, Matiss M., Jevdokimovs, Daniels, Prikulis, Juris, Erts, Donats
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825539/
https://www.ncbi.nlm.nih.gov/pubmed/33419203
http://dx.doi.org/10.3390/nano11010117
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author Jasulaneca, Liga
Livshits, Alexander I.
Meija, Raimonds
Kosmaca, Jelena
Sondors, Raitis
Ramma, Matiss M.
Jevdokimovs, Daniels
Prikulis, Juris
Erts, Donats
author_facet Jasulaneca, Liga
Livshits, Alexander I.
Meija, Raimonds
Kosmaca, Jelena
Sondors, Raitis
Ramma, Matiss M.
Jevdokimovs, Daniels
Prikulis, Juris
Erts, Donats
author_sort Jasulaneca, Liga
collection PubMed
description Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS.
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spelling pubmed-78255392021-01-24 Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches Jasulaneca, Liga Livshits, Alexander I. Meija, Raimonds Kosmaca, Jelena Sondors, Raitis Ramma, Matiss M. Jevdokimovs, Daniels Prikulis, Juris Erts, Donats Nanomaterials (Basel) Article Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS. MDPI 2021-01-06 /pmc/articles/PMC7825539/ /pubmed/33419203 http://dx.doi.org/10.3390/nano11010117 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Jasulaneca, Liga
Livshits, Alexander I.
Meija, Raimonds
Kosmaca, Jelena
Sondors, Raitis
Ramma, Matiss M.
Jevdokimovs, Daniels
Prikulis, Juris
Erts, Donats
Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title_full Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title_fullStr Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title_full_unstemmed Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title_short Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches
title_sort fabrication and characterization of double- and single-clamped cuo nanowire based nanoelectromechanical switches
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825539/
https://www.ncbi.nlm.nih.gov/pubmed/33419203
http://dx.doi.org/10.3390/nano11010117
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