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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal

Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...

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Autores principales: Tong, Yinjie, Han, Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825680/
https://www.ncbi.nlm.nih.gov/pubmed/33430263
http://dx.doi.org/10.3390/mi12010062
_version_ 1783640363440799744
author Tong, Yinjie
Han, Tao
author_facet Tong, Yinjie
Han, Tao
author_sort Tong, Yinjie
collection PubMed
description Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient ([Formula: see text]) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.
format Online
Article
Text
id pubmed-7825680
institution National Center for Biotechnology Information
language English
publishDate 2021
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-78256802021-01-24 Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal Tong, Yinjie Han, Tao Micromachines (Basel) Article Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient ([Formula: see text]) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators. MDPI 2021-01-07 /pmc/articles/PMC7825680/ /pubmed/33430263 http://dx.doi.org/10.3390/mi12010062 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Tong, Yinjie
Han, Tao
Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title_full Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title_fullStr Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title_full_unstemmed Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title_short Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
title_sort anchor loss reduction of lamb wave resonator by pillar-based phononic crystal
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825680/
https://www.ncbi.nlm.nih.gov/pubmed/33430263
http://dx.doi.org/10.3390/mi12010062
work_keys_str_mv AT tongyinjie anchorlossreductionoflambwaveresonatorbypillarbasedphononiccrystal
AT hantao anchorlossreductionoflambwaveresonatorbypillarbasedphononiccrystal