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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal
Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pill...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7825680/ https://www.ncbi.nlm.nih.gov/pubmed/33430263 http://dx.doi.org/10.3390/mi12010062 |