The Wafer-Level Integration of Single-Crystal LiNbO(3) on Silicon via Polyimide Material

In situ measurements of sensing signals in space platforms requires that the micro-electro-mechanical system (MEMS) sensors be located directly at the point to be measured and in contact with the subject to be measured. Traditional radiation-tolerant silicon-based MEMS sensors cannot acquire spatial...

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Detalles Bibliográficos
Autores principales: Yang, Xiangyu, Geng, Wenping, Bi, Kaixi, Mei, Linyu, Li, Yaqing, He, Jian, Mu, Jiliang, Hou, Xiaojuan, Chou, Xiujian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826505/
https://www.ncbi.nlm.nih.gov/pubmed/33435433
http://dx.doi.org/10.3390/mi12010070

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826505/
https://www.ncbi.nlm.nih.gov/pubmed/33435433
http://dx.doi.org/10.3390/mi12010070

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