Cargando…

The Wafer-Level Integration of Single-Crystal LiNbO(3) on Silicon via Polyimide Material

In situ measurements of sensing signals in space platforms requires that the micro-electro-mechanical system (MEMS) sensors be located directly at the point to be measured and in contact with the subject to be measured. Traditional radiation-tolerant silicon-based MEMS sensors cannot acquire spatial...

Descripción completa

Detalles Bibliográficos
Autores principales:	Yang, Xiangyu, Geng, Wenping, Bi, Kaixi, Mei, Linyu, Li, Yaqing, He, Jian, Mu, Jiliang, Hou, Xiaojuan, Chou, Xiujian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7826505/ https://www.ncbi.nlm.nih.gov/pubmed/33435433 http://dx.doi.org/10.3390/mi12010070

Ejemplares similares

Integration Technology for Wafer-Level LiNbO(3) Single-Crystal Thin Film on Silicon by Polyimide Adhesive Bonding and Chemical Mechanical Polishing
por: Geng, Wenping, et al.
Publicado: (2021)

Influence of Structural Parameters on Performance of SAW Resonators Based on 128° YX LiNbO(3) Single Crystal
por: Geng, Wenping, et al.
Publicado: (2022)

High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO(3) Single-Crystal Cantilever Beams
por: Wei, Huifen, et al.
Publicado: (2022)

Electric-Force Conversion Performance of Si-Based LiNbO(3) Devices Based on Four Cantilever Beams
por: Zhang, Huiyi, et al.
Publicado: (2023)

State of the Art in Crystallization of LiNbO(3) and Their Applications
por: Chen, Kunfeng, et al.
Publicado: (2021)

Good-Quality and High-Efficiency Dicing for Thick LiNbO(3) Wafers Using Picosecond Laser Pulses
por: Lei, Mingwei, et al.
Publicado: (2019)

LiNbO(3) dynamic memristors for reservoir computing
por: Zhao, Yuanxi, et al.
Publicado: (2023)

Advanced Etching Techniques of LiNbO(3) Nanodevices
por: Shen, Bowen, et al.
Publicado: (2023)

Reliable Fabrication of Graphene Nanostructure Based on e-Beam Irradiation of PMMA/Copper Composite Structure
por: Bi, Kaixi, et al.
Publicado: (2021)

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr(0.53)Ti(0.47))O(3) Thin Films
por: He, Jian, et al.
Publicado: (2019)

Diffusion control of an ion by another in LiNbO(3) and LiTaO(3) crystals
por: Zhang, De-Long, et al.
Publicado: (2015)

Synthesis of LiNbO(3) nanoparticles in a mesoporous matrix
por: Grigas, Anett, et al.
Publicado: (2011)

Structural Aspects LiNbO(3) Nanoparticles and Their Ferromagnetic Properties
por: Diaz-Moreno, Carlos A., et al.
Publicado: (2014)

Studying the Pyroelectric Effects of LiNbO(3) Modified Composites
por: Zhang, Fan, et al.
Publicado: (2020)

Quadrupole interaction of $^{8}$Li and $^{9}$Li in LiNbO$_{3}$ and the quadrupole moment of $^{9}$Li
por: Arnold, E, et al.
Publicado: (1988)

Piezoelectric Energy Harvester Based on LiNbO(3) Thin Films
por: Vakulov, Zakhar, et al.
Publicado: (2020)

Fabrication and Characteristics of Heavily Fe-Doped LiNbO(3)/Si Heterojunction
por: Li, Wencan, et al.
Publicado: (2019)

The Experimental Registration of the Evanescent Acoustic Wave in YX LiNbO(3) Plate
por: Smirnov, Andrey, et al.
Publicado: (2021)

Plasmonic Refractive Index and Temperature Sensor Based on Graphene and LiNbO(3)
por: Irfan, Muhammad, et al.
Publicado: (2022)

Through-Holes Design for Ideal LiNbO(3) A1 Resonators
por: Wu, Shu-Mao, et al.
Publicado: (2023)

All-laser-micromachining of ridge waveguides in LiNbO(3) crystal for mid-infrared band applications
por: Li, Lingqi, et al.
Publicado: (2017)

Interfacial Modeling of Fibrinogen Adsorption onto LiNbO(3) Single Crystal–Single Domain Surfaces
por: Cross, Jeffrey S., et al.
Publicado: (2021)

Lead-free LiNbO(3) nanowire-based nanocomposite for piezoelectric power generation
por: Yun, Byung Kil, et al.
Publicado: (2014)

Fabrications of L-Band LiNbO(3)-Based SAW Resonators for Aerospace Applications
por: Hu, Baofa, et al.
Publicado: (2019)

Single-block pulse-on electro-optic Q-switch made of LiNbO(3)
por: Shang, Jifang, et al.
Publicado: (2017)

First-principles study on the structural, elastic, electronic and optical properties of LiNbO(3)
por: Hossain, Md. Moazzem
Publicado: (2019)

Self-Biased Bidomain LiNbO(3)/Ni/Metglas Magnetoelectric Current Sensor
por: Bichurin, Mirza I., et al.
Publicado: (2020)

Hybrid Ag–LiNbO(3) nanocomposite thin films with tailorable optical properties
por: Huang, Jijie, et al.
Publicado: (2020)

Effect of Surface Charge Characteristics of Ferroelectric LiNbO(3) on Wettability of Ionic Liquids
por: Tang, Bo, et al.
Publicado: (2022)

Linear Tuning of Phase-Matching Temperature in LiNbO(3):Zr Crystals by MgO Co-Doping
por: Kong, Tengfei, et al.
Publicado: (2019)

Molten Chlorides as the Precursors to Modify the Ionic Composition and Properties of LiNbO(3) Single Crystal and Fine Powders
por: Viugin, Nikolay A., et al.
Publicado: (2022)

Growing, Structure and Optical Properties of LiNbO(3):B Crystals, a Material for Laser Radiation Transformation
por: Palatnikov, Mikhail, et al.
Publicado: (2023)

Effect of Defects on Spontaneous Polarization in Pure and Doped LiNbO(3): First-Principles Calculations
por: Wang, Weiwei, et al.
Publicado: (2018)

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO(3) Films Grown by Laser Ablation
por: Vakulov, Zakhar, et al.
Publicado: (2020)

Steering and Encoding the Polarization of the Second Harmonic in the Visible with a Monolithic LiNbO(3) Metasurface
por: Carletti, Luca, et al.
Publicado: (2021)

Multiple Scattering and Random Quasi-Phase-Matching in Disordered Assemblies of LiNbO(3) Nanocubes
por: Morandi, Andrea, et al.
Publicado: (2022)

Enhancement of THz generation in LiNbO(3) waveguides via multi-bounce velocity matching
por: Dastrup, Blake S., et al.
Publicado: (2022)

Damage mechanism and electro-elastic stability of LiNbO(3) crystals irradiated with 6 MeV Xe(23+)
por: Tian, Shiwei, et al.
Publicado: (2020)

LiNbO(3) Coating on Concrete Surface: A New and Environmentally Friendly Route for Artificial Photosynthesis
por: Nath, Ranjit K., et al.
Publicado: (2013)

THz Pyro-Optical Detector Based on LiNbO(3) Whispering Gallery Mode Microdisc Resonator
por: Cosci, Alessandro, et al.
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_20l92tm2rr2lhksp0eukl2j4o9