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Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning

Profile measurement is a key technical enabler in the manufacturing of highly curved freeform surfaces due to their complex geometrical shape. A current optical probe was used to measure nearly rotary freeform surfaces with the help of one rotation axis, because the probe needs to measure along the...

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Detalles Bibliográficos
Autores principales: Miao, Li, Zhu, Linlin, Fang, Changshuai, Yan, Ning, Yang, Xudong, Zhang, Xiaodong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7829850/
https://www.ncbi.nlm.nih.gov/pubmed/33466741
http://dx.doi.org/10.3390/s21020554
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author Miao, Li
Zhu, Linlin
Fang, Changshuai
Yan, Ning
Yang, Xudong
Zhang, Xiaodong
author_facet Miao, Li
Zhu, Linlin
Fang, Changshuai
Yan, Ning
Yang, Xudong
Zhang, Xiaodong
author_sort Miao, Li
collection PubMed
description Profile measurement is a key technical enabler in the manufacturing of highly curved freeform surfaces due to their complex geometrical shape. A current optical probe was used to measure nearly rotary freeform surfaces with the help of one rotation axis, because the probe needs to measure along the normal vector of the surface under the limitation of the numerical aperture (NA). This kind of measuring system generally has a high cost due to the high-precision, multi-axis platform. In this paper, we propose a low-cost, dual-axis rotation scanning method for a highly curved freeform surface with an arbitrary shape. The optical probe can scan the surface profile while always keeping consistent with the normal vector of the measuring points with the help of the double rotation axis. This method can adapt to the changes in curvature in any direction for a highly curved freeform surface. In addition, the proposed method provides a system error calibration technique for the rotation axis errors. This technique can be used to avoid the dependence of the measuring system on the high-precision platform. The three key system errors that affect the measurement accuracy such as installation error of the B-axis, A-axis, and XZ perpendicularity error are first analyzed through establishing an error model. Then, the real error values are obtained by the optimal calculation in the calibration process. Finally, the feasibility of the measurement method is verified by measuring one cone mirror and an F-theta mirror and comparing the results to those obtained using commercial equipment. The maximum measurable angle of the system is ±90°, the maximum measurable diameter is 100 mm, and the measurement accuracy of the system reaches the micron level in this paper.
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spelling pubmed-78298502021-01-26 Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning Miao, Li Zhu, Linlin Fang, Changshuai Yan, Ning Yang, Xudong Zhang, Xiaodong Sensors (Basel) Article Profile measurement is a key technical enabler in the manufacturing of highly curved freeform surfaces due to their complex geometrical shape. A current optical probe was used to measure nearly rotary freeform surfaces with the help of one rotation axis, because the probe needs to measure along the normal vector of the surface under the limitation of the numerical aperture (NA). This kind of measuring system generally has a high cost due to the high-precision, multi-axis platform. In this paper, we propose a low-cost, dual-axis rotation scanning method for a highly curved freeform surface with an arbitrary shape. The optical probe can scan the surface profile while always keeping consistent with the normal vector of the measuring points with the help of the double rotation axis. This method can adapt to the changes in curvature in any direction for a highly curved freeform surface. In addition, the proposed method provides a system error calibration technique for the rotation axis errors. This technique can be used to avoid the dependence of the measuring system on the high-precision platform. The three key system errors that affect the measurement accuracy such as installation error of the B-axis, A-axis, and XZ perpendicularity error are first analyzed through establishing an error model. Then, the real error values are obtained by the optimal calculation in the calibration process. Finally, the feasibility of the measurement method is verified by measuring one cone mirror and an F-theta mirror and comparing the results to those obtained using commercial equipment. The maximum measurable angle of the system is ±90°, the maximum measurable diameter is 100 mm, and the measurement accuracy of the system reaches the micron level in this paper. MDPI 2021-01-14 /pmc/articles/PMC7829850/ /pubmed/33466741 http://dx.doi.org/10.3390/s21020554 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Miao, Li
Zhu, Linlin
Fang, Changshuai
Yan, Ning
Yang, Xudong
Zhang, Xiaodong
Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title_full Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title_fullStr Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title_full_unstemmed Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title_short Modeling and Analysis of System Error for Highly Curved Freeform Surface Measurement by Noncontact Dual-Axis Rotary Scanning
title_sort modeling and analysis of system error for highly curved freeform surface measurement by noncontact dual-axis rotary scanning
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7829850/
https://www.ncbi.nlm.nih.gov/pubmed/33466741
http://dx.doi.org/10.3390/s21020554
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