Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry

Next-generation nano- and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here, we present the first phase-sensitive extreme ultravi...

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Detalles Bibliográficos
Autores principales: Tanksalvala, Michael, Porter, Christina L., Esashi, Yuka, Wang, Bin, Jenkins, Nicholas W., Zhang, Zhe, Miley, Galen P., Knobloch, Joshua L., McBennett, Brendan, Horiguchi, Naoto, Yazdi, Sadegh, Zhou, Jihan, Jacobs, Matthew N., Bevis, Charles S., Karl, Robert M., Johnsen, Peter, Ren, David, Waller, Laura, Adams, Daniel E., Cousin, Seth L., Liao, Chen-Ting, Miao, Jianwei, Gerrity, Michael, Kapteyn, Henry C., Murnane, Margaret M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2021
Materias:
Research Articles
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7840142/
https://www.ncbi.nlm.nih.gov/pubmed/33571123
http://dx.doi.org/10.1126/sciadv.abd9667

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7840142/
https://www.ncbi.nlm.nih.gov/pubmed/33571123
http://dx.doi.org/10.1126/sciadv.abd9667

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