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Development of an Automated Optical Inspection System for Rapidly and Precisely Measuring Dimensions of Embedded Microchannel Structures in Transparent Bonded Chips

This study aimed to develop an automated optical inspection (AOI) system that can rapidly and precisely measure the dimensions of microchannels embedded inside a transparent polymeric substrate, and can eventually be used on the production line of a factory. The AOI system is constructed based on Sn...

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Detalles Bibliográficos
Autores principales: Chen, Pin-Chuan, Lin, Ya-Ting, Truong, Chi-Minh, Chen, Pai-Shan, Chiang, Huihua-Kenny
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7864200/
https://www.ncbi.nlm.nih.gov/pubmed/33498437
http://dx.doi.org/10.3390/s21030698