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Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...

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Detalles Bibliográficos
Autores principales:	Liu, Tianning, Dangi, Ajay, Kim, Jeong Nyeon, Kothapalli, Sri-Rajasekhar, Choi, Kyusun, Trolier-McKinstry, Susan, Jackson, Thomas
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7867341/ https://www.ncbi.nlm.nih.gov/pubmed/33540796 http://dx.doi.org/10.3390/s21031014

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