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Quantitative SEM characterisation of ceramic target prior and after magnetron sputtering: a case study of aluminium zinc oxide

Till now electron microscopy techniques have not been used to evaluate the plasma–target interactions undergone during the magnetron sputtering process. The destructive nature of this interaction severely alters the target microstructure. Utilising quantitative microscopy techniques can shed light o...

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Detalles Bibliográficos
Autores principales:	JAHANGIRI, ALI REZA, RAJABI KALVANI, PAYAM, SHAPOURI, SAMANEH, SARI, AMIRHOSSEIN, ŢĂLU, ŞTEFAN, JALILI, YOUSEF SEYED
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	John Wiley and Sons Inc. 2020
Materias:	Original Articles
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7891359/ https://www.ncbi.nlm.nih.gov/pubmed/32926411 http://dx.doi.org/10.1111/jmi.12961

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