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MEMS Membranes with Nanoscale Holes for Analytical Applications

Micro-electro-mechanical membranes having nanoscale holes were developed, to be used as a nanofluidic sample inlet in novel analytical applications. Nanoscopic holes can be used as sampling points to enable a molecular flow regime, enhancing the performance and simplifying the layout of mass spectro...

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Detalles Bibliográficos
Autores principales:	Bagolini, Alvise, Correale, Raffaele, Picciotto, Antonino, Di Lorenzo, Maurizio, Scapinello, Marco
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7909423/ https://www.ncbi.nlm.nih.gov/pubmed/33498406 http://dx.doi.org/10.3390/membranes11020074

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