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Mechanistic study of the gas-phase chemistry during the spray deposition of Zn(O,S) films by mass spectrometry
The mass spectrometer, is a powerful tool to identify species and investigate reactions in the gas phase. In this work, the mechanism of aerosol assisted chemical vapor deposition (AACVD) of Zn(O,S) films prepared from H(2)S and zinc acetylacetonate (Zn(acac)(2)) precursor solutions is elucidated by...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7910520/ https://www.ncbi.nlm.nih.gov/pubmed/33639531 http://dx.doi.org/10.1016/j.ultsonch.2021.105492 |