Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint

Nanoimprint technology is powerful for fabricating nanostructures in a large area. However, expensive equipment, high cost, and complex process conditions hinder the application of nano-imprinting technology. Therefore, double-layer self-priming nanoimprint technology was proposed to fabricate order...

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Detalles Bibliográficos
Autores principales: Su, Yue, Geng, Zhaoxin, Fang, Weihao, Lv, Xiaoqing, Wang, Shicai, Ma, Zhengtai, Pei, Weihua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911382/
https://www.ncbi.nlm.nih.gov/pubmed/33498873
http://dx.doi.org/10.3390/mi12020121

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911382/
https://www.ncbi.nlm.nih.gov/pubmed/33498873
http://dx.doi.org/10.3390/mi12020121

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