A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

In this paper, we report a novel teeter-totter type accelerometer based on glass-silicon composite wafers. Unlike the ordinary micro-electro-mechanical systems (MEMS) accelerometers, the entire structure of the accelerometer, includes the mass, the springs, and the composite wafer. The composite waf...

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Detalles Bibliográficos
Autores principales: He, Yurong, Si, Chaowei, Han, Guowei, Zhao, Yongmei, Ning, Jin, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911678/
https://www.ncbi.nlm.nih.gov/pubmed/33494437
http://dx.doi.org/10.3390/mi12020102

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7911678/
https://www.ncbi.nlm.nih.gov/pubmed/33494437
http://dx.doi.org/10.3390/mi12020102

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