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Experimental Study on Ultrasonic Vibration-Assisted WECDM of Glass Microstructures with a High Aspect Ratio

With the rapid development of micro-electro-mechanical systems (MEMSs), the demand for glass microstructure is increasing. For the purpose of achieving high quality and stable machining of glass microstructures with a high aspect ratio, ultrasonic vibration is applied into the micro-wire electrochem...

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Detalles Bibliográficos
Autores principales:	Chen, Yan, Feng, Xu, Xin, Gongming
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7912486/ https://www.ncbi.nlm.nih.gov/pubmed/33530323 http://dx.doi.org/10.3390/mi12020125

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