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Highly Fast Response of Pd/Ta(2)O(5)/SiC and Pd/Ta(2)O(5)/Si Schottky Diode-Based Hydrogen Sensors

Herein, the fabrication of a novel highly sensitive and fast hydrogen (H(2)) gas sensor, based on the Ta(2)O(5) Schottky diode, is described. First, Ta(2)O(5) thin films are deposited on silicon carbide (SiC) and silicon (Si) substrates via a radio frequency (RF) sputtering method. Then, Pd and Ni a...

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Detalles Bibliográficos
Autores principales:	Hussain, Muhammad, Jeong, Woonyoung, Kang, Il-Suk, Choi, Kyeong-Keun, Jaffery, Syed Hassan Abbas, Ali, Asif, Hussain, Tassawar, Ayaz, Muhammad, Hussain, Sajjad, Jung, Jongwan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7913499/ https://www.ncbi.nlm.nih.gov/pubmed/33546357 http://dx.doi.org/10.3390/s21041042

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