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Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates

Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O(2)/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O(2)/Ar flow rate...

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Autores principales: Marciel, Alice, Graça, Manuel, Bastos, Alexandre, Pereira, Luiz, Suresh Kumar, Jakka, Borges, Joel, Vaz, Filipe, Peres, Marco, Magalhães, Sergio, Lorenz, Katharina, Silva, Rui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915743/
https://www.ncbi.nlm.nih.gov/pubmed/33572165
http://dx.doi.org/10.3390/ma14040821
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author Marciel, Alice
Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, Filipe
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
author_facet Marciel, Alice
Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, Filipe
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
author_sort Marciel, Alice
collection PubMed
description Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O(2)/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O(2)/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO(x) films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm(3). The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.
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spelling pubmed-79157432021-03-01 Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates Marciel, Alice Graça, Manuel Bastos, Alexandre Pereira, Luiz Suresh Kumar, Jakka Borges, Joel Vaz, Filipe Peres, Marco Magalhães, Sergio Lorenz, Katharina Silva, Rui Materials (Basel) Article Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O(2)/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O(2)/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO(x) films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm(3). The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices. MDPI 2021-02-09 /pmc/articles/PMC7915743/ /pubmed/33572165 http://dx.doi.org/10.3390/ma14040821 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Marciel, Alice
Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, Filipe
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title_full Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title_fullStr Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title_full_unstemmed Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title_short Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates
title_sort molybdenum oxide thin films grown on flexible ito-coated pet substrates
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915743/
https://www.ncbi.nlm.nih.gov/pubmed/33572165
http://dx.doi.org/10.3390/ma14040821
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