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Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level
The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone f...
| Autores principales: | , , , , , , , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915810/ https://www.ncbi.nlm.nih.gov/pubmed/33562598 http://dx.doi.org/10.3390/s21041103 |
| _version_ | 1783657333098807296 |
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| author | Arezki, Yassir Su, Rong Heikkinen, Ville Leprete, François Posta, Pavel Bitou, Youichi Schober, Christian Mehdi-Souzani, Charyar Alzahrani, Bandar Abdulrahman Mohammed Zhang, Xiangchao Kondo, Yohan Pruss, Christof Ledl, Vit Anwer, Nabil Bouazizi, Mohamed Lamjed Leach, Richard Nouira, Hichem |
| author_facet | Arezki, Yassir Su, Rong Heikkinen, Ville Leprete, François Posta, Pavel Bitou, Youichi Schober, Christian Mehdi-Souzani, Charyar Alzahrani, Bandar Abdulrahman Mohammed Zhang, Xiangchao Kondo, Yohan Pruss, Christof Ledl, Vit Anwer, Nabil Bouazizi, Mohamed Lamjed Leach, Richard Nouira, Hichem |
| author_sort | Arezki, Yassir |
| collection | PubMed |
| description | The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes. |
| format | Online Article Text |
| id | pubmed-7915810 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 2021 |
| publisher | MDPI |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-79158102021-03-01 Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level Arezki, Yassir Su, Rong Heikkinen, Ville Leprete, François Posta, Pavel Bitou, Youichi Schober, Christian Mehdi-Souzani, Charyar Alzahrani, Bandar Abdulrahman Mohammed Zhang, Xiangchao Kondo, Yohan Pruss, Christof Ledl, Vit Anwer, Nabil Bouazizi, Mohamed Lamjed Leach, Richard Nouira, Hichem Sensors (Basel) Article The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes. MDPI 2021-02-05 /pmc/articles/PMC7915810/ /pubmed/33562598 http://dx.doi.org/10.3390/s21041103 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
| spellingShingle | Article Arezki, Yassir Su, Rong Heikkinen, Ville Leprete, François Posta, Pavel Bitou, Youichi Schober, Christian Mehdi-Souzani, Charyar Alzahrani, Bandar Abdulrahman Mohammed Zhang, Xiangchao Kondo, Yohan Pruss, Christof Ledl, Vit Anwer, Nabil Bouazizi, Mohamed Lamjed Leach, Richard Nouira, Hichem Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title | Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title_full | Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title_fullStr | Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title_full_unstemmed | Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title_short | Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level |
| title_sort | traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level |
| topic | Article |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7915810/ https://www.ncbi.nlm.nih.gov/pubmed/33562598 http://dx.doi.org/10.3390/s21041103 |
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