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Evaluation and Optimization of a MOEMS Active Focusing Device

In this paper we present a detailed evaluation of a micro-opto-electromechanical system (MOEMS) for active focusing which is realized using an electrostatically deformed thin silicon membrane. The evaluation is done using finite element methods and experimental characterization of the device behavio...

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Detalles Bibliográficos
Autores principales:	Mescheder, Ulrich, Lootze, Michael, Aljasem, Khaled
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7916260/ https://www.ncbi.nlm.nih.gov/pubmed/33572402 http://dx.doi.org/10.3390/mi12020172

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