Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces

Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The pol...

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Detalles Bibliográficos
Autores principales: Sala, Federico, Paié, Petra, Martínez Vázquez, Rebeca, Osellame, Roberto, Bragheri, Francesca
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7918068/
https://www.ncbi.nlm.nih.gov/pubmed/33670373
http://dx.doi.org/10.3390/mi12020180

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7918068/
https://www.ncbi.nlm.nih.gov/pubmed/33670373
http://dx.doi.org/10.3390/mi12020180

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