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Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process

A radio frequency microelectromechanical system switch (MSS) manufactured by the complementary metal oxide semiconductor (CMOS) process is presented. The MSS is a capacitive shunt type. Structure for the MSS consists of coplanar waveguide (CPW) lines, a membrane, and springs. The membrane locates ov...

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Detalles Bibliográficos
Autores principales:	Tsai, Zung-You, Shih, Po-Jen, Tsai, Yao-Chuan, Dai, Ching-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Communication
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7922824/ https://www.ncbi.nlm.nih.gov/pubmed/33671232 http://dx.doi.org/10.3390/s21041396

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