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Nanophotonic crystals on unpolished sapphire substrates for deep-UV light-emitting diodes
A new method has been established and employed to create a random nanophotonic crystal (NPhC) structure without photolithography on the unpolished side of a single-side-polished sapphire substrate. This nano structure has potential use in enhancing the light-extraction efficiency (LEE) of deep ultra...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7925600/ https://www.ncbi.nlm.nih.gov/pubmed/33654153 http://dx.doi.org/10.1038/s41598-021-84426-z |