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Design and Fabrication of a MEMS Electromagnetic Swing-Type Actuator for Optical Switch
A microelectromechanical systems system (MEMS) electromagnetic swing-type actuator is proposed for an optical fiber switch in this paper. The actuator has a compact size of 5.1 × 5.1 × 5.3 mm(3), consisting of two stators, a swing disc (rotator), a rotating shaft, and protective covers. Multi-windin...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7927025/ https://www.ncbi.nlm.nih.gov/pubmed/33671536 http://dx.doi.org/10.3390/mi12020221 |