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Ghost Beam Suppression in Deep Frequency Modulation Interferometry for Compact On-Axis Optical Heads
We present a compact optical head design for wide-range and low noise displacement sensing using deep frequency modulation interferometry (DFMI). The on-axis beam topology is realised in a quasi-monolithic component and relies on cube beamsplitters and beam transmission through perpendicular surface...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7958118/ https://www.ncbi.nlm.nih.gov/pubmed/33801264 http://dx.doi.org/10.3390/s21051708 |