Ozone Sensing by In(2)O(3) Films Modified with Rh: Dimension Effect

We considered the effect of coverage of the surface of In(2)O(3) films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0–0.1 ML. The In(2)O(3) films deposited by spray pyrolysis had a thickness of 40–50 nm...

Descripción completa

Detalles Bibliográficos
Autores principales: Korotcenkov, Ghenadii, Nehasil, Vaclav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7962652/
https://www.ncbi.nlm.nih.gov/pubmed/33800333
http://dx.doi.org/10.3390/s21051886
Descripción
Sumario:We considered the effect of coverage of the surface of In(2)O(3) films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0–0.1 ML. The In(2)O(3) films deposited by spray pyrolysis had a thickness of 40–50 nm. The sensor response to ozone depends on the degree of rhodium coverage. This dependence has a pronounced maximum at a coverage of ~0.01 ML of Rh. An explanation is given for this effect. It is concluded that the observed changes are associated with the transition from the atomically dispersed state of rhodium to a 3D cluster state.

Ejemplares similares