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Ozone Sensing by In(2)O(3) Films Modified with Rh: Dimension Effect
We considered the effect of coverage of the surface of In(2)O(3) films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0–0.1 ML. The In(2)O(3) films deposited by spray pyrolysis had a thickness of 40–50 nm...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7962652/ https://www.ncbi.nlm.nih.gov/pubmed/33800333 http://dx.doi.org/10.3390/s21051886 |