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Organoselenium Precursors for Atomic Layer Deposition

[Image: see text] Organoselenium compounds with perspective application as Se precursors for atomic layer deposition have been reviewed. The originally limited portfolio of available Se precursors such as H(2)Se and diethyl(di)selenide has recently been extended by bis(trialkylsilyl)selenides, bis(t...

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Detalles Bibliográficos
Autores principales:	Charvot, Jaroslav, Zazpe, Raul, Macak, Jan M., Bureš, Filip
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2021
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7970478/ https://www.ncbi.nlm.nih.gov/pubmed/33748567 http://dx.doi.org/10.1021/acsomega.1c00223

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