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Enhanced ferroelectric switching speed of Si-doped HfO(2) thin film tailored by oxygen deficiency

Investigations concerning oxygen deficiency will increase our understanding of those factors that govern the overall material properties. Various studies have examined the relationship between oxygen deficiency and the phase transformation from a nonpolar phase to a polar phase in HfO(2) thin films....

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Detalles Bibliográficos
Autores principales:	Lee, Kyoungjun, Park, Kunwoo, Lee, Hyun-Jae, Song, Myeong Seop, Lee, Kyu Cheol, Namkung, Jin, Lee, Jun Hee, Park, Jungwon, Chae, Seung Chul
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7973512/ https://www.ncbi.nlm.nih.gov/pubmed/33737670 http://dx.doi.org/10.1038/s41598-021-85773-7

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