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Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window

We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2...

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Detalles Bibliográficos
Autores principales: Park, Jin-Hyeok, Kim, Chan-Hwi, Lee, Ju-Hyeon, Kim, Han-Ki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7996484/
https://www.ncbi.nlm.nih.gov/pubmed/33668908
http://dx.doi.org/10.3390/mi12030233