Performance of Quad Mass Gyroscope in the Angular Rate Mode

In this paper, the characterization and analysis of a silicon micromachined Quad Mass Gyroscope (QMG) in the rate mode of operation are presented. We report on trade-offs between full-scale, linearity, and noise characteristics of QMGs with different Q-factors. Allan Deviation (ADEV) and Power Spectral Density (PSD) analysis methods were used to evaluate the performance results. The devices in this study were instrumented for the rate mode of operation, with the Open-Loop (OL) and Force-to-Rebalance (FRB) configurations of the sense mode. For each method of instrumentation, we presented constraints on selection of control parameters with respect to the Q-factor of the devices. For the high Q-factor device of over 2 million, and uncompensated frequency asymmetry of 60 [Formula: see text] [Formula: see text] , we demonstrated bias instability of [Formula: see text] [Formula: see text] / [Formula: see text] r and Angle Random Walk (ARW) of [Formula: see text] [Formula: see text] / [Formula: see text] in the OL mode of operation and bias instability of [Formula: see text] [Formula: see text] / [Formula: see text] r and ARW of [Formula: see text] [Formula: see text] / [Formula: see text] in the FRB mode of operation. We concluded that in a realistic MEMS gyroscope with imperfections (nearly matched, but non-zero frequency asymmetry), a higher Q-factor would increase the frequency stability of the drive axis resulting in an improved noise performance, but has challenges in implementation of digital control loops.