Surface Modification Using Assisting Electrodes in Wire Electrical Discharge Machining for Silicon Wafer Preparation

This paper outlines notable advances in the wire electrical discharge machining of polycrystalline silicon workpieces for wafer preparation. Our use of assisting electrodes permits the transfer of aluminum particles to the machined surface of the polycrystalline silicon workpieces, to enhance conduc...

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Detalles Bibliográficos
Autores principales: Kuo, Chunliang, Nien, Yupang, Chiang, Anchun, Hirata, Atsushi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998807/
https://www.ncbi.nlm.nih.gov/pubmed/33799619
http://dx.doi.org/10.3390/ma14061355

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7998807/
https://www.ncbi.nlm.nih.gov/pubmed/33799619
http://dx.doi.org/10.3390/ma14061355

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