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A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs

This paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency character...

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Detalles Bibliográficos
Autores principales:	Chiu, Yihsiang, Wang, Chen, Gong, Dan, Li, Nan, Ma, Shenglin, Jin, Yufeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7999705/ https://www.ncbi.nlm.nih.gov/pubmed/33800370 http://dx.doi.org/10.3390/mi12030284

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