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Temperature Dependence of Stress and Optical Properties in AlN Films Grown by MOCVD

AlN epilayers were grown on a 2-inch [0001] conventional flat sapphire substrate (CSS) and a nano-patterned sapphire substrate (NPSS) by metalorganic chemical vapor deposition. In this work, the effect of the substrate template and temperature on stress and optical properties of AlN films has been s...

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Detalles Bibliográficos
Autores principales:	Wei, Wenwang, Peng, Yi, Wang, Jiabin, Farooq Saleem, Muhammad, Wang, Wen, Li, Lei, Wang, Yukun, Sun, Wenhong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7999848/ https://www.ncbi.nlm.nih.gov/pubmed/33802171 http://dx.doi.org/10.3390/nano11030698

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