Cargando…

Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers

Deriving mesoporous ZnO from calcinated, molecular layer deposited (MLD) metal-organic hybrid thin films offers various advantages, e.g., tunable crystallinity and porosity, as well as great film conformality and thickness control. However, such methods have barely been investigated. In this contrib...

Descripción completa

Detalles Bibliográficos
Autores principales: Berger, Richard, Seiler, Martin, Perrotta, Alberto, Coclite, Anna Maria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8000224/
https://www.ncbi.nlm.nih.gov/pubmed/33804054
http://dx.doi.org/10.3390/ma14061418
_version_ 1783670954468048896
author Berger, Richard
Seiler, Martin
Perrotta, Alberto
Coclite, Anna Maria
author_facet Berger, Richard
Seiler, Martin
Perrotta, Alberto
Coclite, Anna Maria
author_sort Berger, Richard
collection PubMed
description Deriving mesoporous ZnO from calcinated, molecular layer deposited (MLD) metal-organic hybrid thin films offers various advantages, e.g., tunable crystallinity and porosity, as well as great film conformality and thickness control. However, such methods have barely been investigated. In this contribution, zinc-organic hybrid layers were for the first time formed via a three-step MLD sequence, using diethylzinc, ethanolamine, and maleic anhydride. These zinc-organic hybrid films were then calcinated with the aim of enhancing the porosity of the obtained ZnO films. The saturation curves for the three-step MLD process were measured, showing a growth rate of 4.4 ± 0.2 Å/cycle. After initial degradation, the zinc-organic layers were found to be stable in ambient air. The transformation behavior of the zinc-organic layers, i.e., the evolution of the film thickness and refractive index as well as the pore formation upon heating to 400, 500, and 600 °C were investigated with the help of spectroscopic ellipsometry and ellipsometric porosimetry. The calculated pore size distribution showed open porosity values of 25%, for the sample calcinated at 400 °C. The corresponding expectation value for the pore radius obtained from this distribution was 2.8 nm.
format Online
Article
Text
id pubmed-8000224
institution National Center for Biotechnology Information
language English
publishDate 2021
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-80002242021-03-28 Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers Berger, Richard Seiler, Martin Perrotta, Alberto Coclite, Anna Maria Materials (Basel) Article Deriving mesoporous ZnO from calcinated, molecular layer deposited (MLD) metal-organic hybrid thin films offers various advantages, e.g., tunable crystallinity and porosity, as well as great film conformality and thickness control. However, such methods have barely been investigated. In this contribution, zinc-organic hybrid layers were for the first time formed via a three-step MLD sequence, using diethylzinc, ethanolamine, and maleic anhydride. These zinc-organic hybrid films were then calcinated with the aim of enhancing the porosity of the obtained ZnO films. The saturation curves for the three-step MLD process were measured, showing a growth rate of 4.4 ± 0.2 Å/cycle. After initial degradation, the zinc-organic layers were found to be stable in ambient air. The transformation behavior of the zinc-organic layers, i.e., the evolution of the film thickness and refractive index as well as the pore formation upon heating to 400, 500, and 600 °C were investigated with the help of spectroscopic ellipsometry and ellipsometric porosimetry. The calculated pore size distribution showed open porosity values of 25%, for the sample calcinated at 400 °C. The corresponding expectation value for the pore radius obtained from this distribution was 2.8 nm. MDPI 2021-03-15 /pmc/articles/PMC8000224/ /pubmed/33804054 http://dx.doi.org/10.3390/ma14061418 Text en © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Berger, Richard
Seiler, Martin
Perrotta, Alberto
Coclite, Anna Maria
Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title_full Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title_fullStr Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title_full_unstemmed Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title_short Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers
title_sort study on porosity in zinc oxide ultrathin films from three-step mld zn-hybrid polymers
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8000224/
https://www.ncbi.nlm.nih.gov/pubmed/33804054
http://dx.doi.org/10.3390/ma14061418
work_keys_str_mv AT bergerrichard studyonporosityinzincoxideultrathinfilmsfromthreestepmldznhybridpolymers
AT seilermartin studyonporosityinzincoxideultrathinfilmsfromthreestepmldznhybridpolymers
AT perrottaalberto studyonporosityinzincoxideultrathinfilmsfromthreestepmldznhybridpolymers
AT cocliteannamaria studyonporosityinzincoxideultrathinfilmsfromthreestepmldznhybridpolymers