A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single pr...

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Detalles Bibliográficos
Autores principales: Saleem, Muhammad Mubasher, Saghir, Shayaan, Bukhari, Syed Ali Raza, Hamza, Amir, Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8002230/
https://www.ncbi.nlm.nih.gov/pubmed/33809735
http://dx.doi.org/10.3390/mi12030310

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