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CuO/PMMA Polymer Nanocomposites as Novel Resist Materials for E-Beam Lithography
Polymer nanocomposites have emerged as a new powerful class of materials because of their versatility, adaptability and wide applicability to a variety of fields. In this work, a facile and cost-effective method to develop poly(methyl methacrylate) (PMMA)-based polymer nanocomposites with copper oxi...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8003112/ https://www.ncbi.nlm.nih.gov/pubmed/33803056 http://dx.doi.org/10.3390/nano11030762 |