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CuO/PMMA Polymer Nanocomposites as Novel Resist Materials for E-Beam Lithography

Polymer nanocomposites have emerged as a new powerful class of materials because of their versatility, adaptability and wide applicability to a variety of fields. In this work, a facile and cost-effective method to develop poly(methyl methacrylate) (PMMA)-based polymer nanocomposites with copper oxi...

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Detalles Bibliográficos
Autores principales: Geka, Georgia, Papageorgiou, George, Chatzichristidi, Margarita, Karydas, Andreas Germanos, Psycharis, Vassilis, Makarona, Eleni
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8003112/
https://www.ncbi.nlm.nih.gov/pubmed/33803056
http://dx.doi.org/10.3390/nano11030762

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