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Progress in Traceable Nanoscale Capacitance Measurements Using Scanning Microwave Microscopy

Reference samples are commonly used for the calibration and quantification of nanoscale electrical measurements of capacitances and dielectric constants in scanning microwave microscopy (SMM) and similar techniques. However, the traceability of these calibration samples is not established. In this w...

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Detalles Bibliográficos
Autores principales: Piquemal, François, Morán-Meza, José, Delvallée, Alexandra, Richert, Damien, Kaja, Khaled
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8004899/
https://www.ncbi.nlm.nih.gov/pubmed/33806948
http://dx.doi.org/10.3390/nano11030820

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