Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

[Image: see text] We present an experimental and theoretical analysis of the formation of nanovoids within Si microcrystals epitaxially grown on Si patterned substrates. The growth conditions leading to the nucleation of nanovoids have been highlighted, and the roles played by the deposition rate, s...

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Detalles Bibliográficos
Autores principales: Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, Montalenti, Francesco, Volz, Kerstin, Isella, Giovanni
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8016367/
https://www.ncbi.nlm.nih.gov/pubmed/33828439
http://dx.doi.org/10.1021/acs.cgd.9b01312

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