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Influence of Sr deficiency on structural and electrical properties of SrTiO(3) thin films grown by metal–organic vapor phase epitaxy

Homoepitaxial growth of SrTiO(3) thin films on 0.5 wt% niobium doped SrTiO(3) (100) substrates with high structural perfection was developed using liquid-delivery spin metal–organic vapor phase epitaxy (MOVPE). Exploiting the advantage of adjusting the partial pressures of the individual constituent...

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Detalles Bibliográficos
Autores principales:	Baki, Aykut, Stöver, Julian, Schulz, Tobias, Markurt, Toni, Amari, Houari, Richter, Carsten, Martin, Jens, Irmscher, Klaus, Albrecht, Martin, Schwarzkopf, Jutta
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8021553/ https://www.ncbi.nlm.nih.gov/pubmed/33820911 http://dx.doi.org/10.1038/s41598-021-87007-2

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