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Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM
[Image: see text] Atomic layer deposition (ALD) provides uniform and conformal thin films that are of interest for a range of applications. To better understand the properties of amorphous ALD films, we need an improved understanding of their local atomic structure. Previous work demonstrated measur...
Autores principales: | Jasim, Ahmed M., He, Xiaoqing, Xing, Yangchuan, White, Tommi A., Young, Matthias J. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2021
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8028128/ https://www.ncbi.nlm.nih.gov/pubmed/33842769 http://dx.doi.org/10.1021/acsomega.0c06124 |
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