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Cryo-ePDF: Overcoming Electron Beam Damage to Study the Local Atomic Structure of Amorphous ALD Aluminum Oxide Thin Films within a TEM

[Image: see text] Atomic layer deposition (ALD) provides uniform and conformal thin films that are of interest for a range of applications. To better understand the properties of amorphous ALD films, we need an improved understanding of their local atomic structure. Previous work demonstrated measur...

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Detalles Bibliográficos
Autores principales:	Jasim, Ahmed M., He, Xiaoqing, Xing, Yangchuan, White, Tommi A., Young, Matthias J.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2021
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8028128/ https://www.ncbi.nlm.nih.gov/pubmed/33842769 http://dx.doi.org/10.1021/acsomega.0c06124

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