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Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography

Oblique submicron-scale structures are used in various aspects of research, such as the directional characteristics of dry adhesives and wettability. Although deposition, etching, and lithography techniques are applied to fabricate oblique submicron-scale structures, these approaches have the proble...

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Detalles Bibliográficos
Autores principales: Kim, Kanghyun, Park, Kyungjin, Nam, Hyoryung, Kim, Geon Hwee, Hong, Seong Kyung, Kim, Suhyeon, Woo, Hyeonsu, Yoon, Seungbin, Kim, Jong Hyun, Lim, Geunbae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8037242/
https://www.ncbi.nlm.nih.gov/pubmed/33810563
http://dx.doi.org/10.3390/polym13071045