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Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography
Oblique submicron-scale structures are used in various aspects of research, such as the directional characteristics of dry adhesives and wettability. Although deposition, etching, and lithography techniques are applied to fabricate oblique submicron-scale structures, these approaches have the proble...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8037242/ https://www.ncbi.nlm.nih.gov/pubmed/33810563 http://dx.doi.org/10.3390/polym13071045 |