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Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry

Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essent...

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Detalles Bibliográficos
Autores principales:	Behrends, Gert, Stöbener, Dirk, Fischer, Andreas
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038277/ https://www.ncbi.nlm.nih.gov/pubmed/33918507 http://dx.doi.org/10.3390/s21072486

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