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Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrica...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038519/ https://www.ncbi.nlm.nih.gov/pubmed/33916616 http://dx.doi.org/10.3390/s21072533 |
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author | Twiefel, Jens Glukhovkoy, Anatoly de Wall, Sascha Wurz, Marc Christopher Sehlmeyer, Merle Hitzemann, Moritz Zimmermann, Stefan |
author_facet | Twiefel, Jens Glukhovkoy, Anatoly de Wall, Sascha Wurz, Marc Christopher Sehlmeyer, Merle Hitzemann, Moritz Zimmermann, Stefan |
author_sort | Twiefel, Jens |
collection | PubMed |
description | The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established. |
format | Online Article Text |
id | pubmed-8038519 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-80385192021-04-12 Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study Twiefel, Jens Glukhovkoy, Anatoly de Wall, Sascha Wurz, Marc Christopher Sehlmeyer, Merle Hitzemann, Moritz Zimmermann, Stefan Sensors (Basel) Communication The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established. MDPI 2021-04-04 /pmc/articles/PMC8038519/ /pubmed/33916616 http://dx.doi.org/10.3390/s21072533 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Communication Twiefel, Jens Glukhovkoy, Anatoly de Wall, Sascha Wurz, Marc Christopher Sehlmeyer, Merle Hitzemann, Moritz Zimmermann, Stefan Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title | Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title_full | Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title_fullStr | Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title_full_unstemmed | Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title_short | Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study |
title_sort | towards a highly sensitive piezoelectric nano-mass detection—a model-based concept study |
topic | Communication |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038519/ https://www.ncbi.nlm.nih.gov/pubmed/33916616 http://dx.doi.org/10.3390/s21072533 |
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