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Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study

The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrica...

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Autores principales: Twiefel, Jens, Glukhovkoy, Anatoly, de Wall, Sascha, Wurz, Marc Christopher, Sehlmeyer, Merle, Hitzemann, Moritz, Zimmermann, Stefan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038519/
https://www.ncbi.nlm.nih.gov/pubmed/33916616
http://dx.doi.org/10.3390/s21072533
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author Twiefel, Jens
Glukhovkoy, Anatoly
de Wall, Sascha
Wurz, Marc Christopher
Sehlmeyer, Merle
Hitzemann, Moritz
Zimmermann, Stefan
author_facet Twiefel, Jens
Glukhovkoy, Anatoly
de Wall, Sascha
Wurz, Marc Christopher
Sehlmeyer, Merle
Hitzemann, Moritz
Zimmermann, Stefan
author_sort Twiefel, Jens
collection PubMed
description The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.
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spelling pubmed-80385192021-04-12 Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study Twiefel, Jens Glukhovkoy, Anatoly de Wall, Sascha Wurz, Marc Christopher Sehlmeyer, Merle Hitzemann, Moritz Zimmermann, Stefan Sensors (Basel) Communication The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established. MDPI 2021-04-04 /pmc/articles/PMC8038519/ /pubmed/33916616 http://dx.doi.org/10.3390/s21072533 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Communication
Twiefel, Jens
Glukhovkoy, Anatoly
de Wall, Sascha
Wurz, Marc Christopher
Sehlmeyer, Merle
Hitzemann, Moritz
Zimmermann, Stefan
Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title_full Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title_fullStr Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title_full_unstemmed Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title_short Towards a Highly Sensitive Piezoelectric Nano-Mass Detection—A Model-Based Concept Study
title_sort towards a highly sensitive piezoelectric nano-mass detection—a model-based concept study
topic Communication
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038519/
https://www.ncbi.nlm.nih.gov/pubmed/33916616
http://dx.doi.org/10.3390/s21072533
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