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Fabry-Perot Pressure Sensors Based on Polycrystalline Diamond Membranes
Pressure sensors based on diamond membranes were designed and tested for gas pressure measurement up to 6.8 MPa. The diamond film (2” diameter, 6 μm thickness)—grown by microwave plasma chemical vapor deposition on a silicon substrate—was a starting material to produce an array of membranes with dif...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038520/ https://www.ncbi.nlm.nih.gov/pubmed/33916574 http://dx.doi.org/10.3390/ma14071780 |