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Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computat...

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Detalles Bibliográficos
Autores principales:	Boom, Boris A., Bertolini, Alessandro, Hennes, Eric, van den Brand, Johannes F. J.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8038799/ https://www.ncbi.nlm.nih.gov/pubmed/33917550 http://dx.doi.org/10.3390/s21072566

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